IEEE SFBA MEMS & Sensors Chapter



Biographies of Officers and ExCom Members:

Janusz BryzekDr. Janusz Bryzek received his MSEE and Ph.D. from Warsaw Technical University, Poland.  He completed Executive Management Program at Stanford University. Janusz is considered as one of the pioneers of MEMS. He cofounded seven Silicon Valley MEMS companies: Sensym (now Honeywell), ICSensors (now Elmos/MSI), NovaSensor (now General Electric), Intelligent MicroSensor Technology (now Maxim), Transparent Networks (now Intel), LVSI (now Atmel), Jyve (now Fairchild Semiconductor).  He is currently VP Development, MEMS and Sensing Solutions at Fairchild Semiconductor. Bryzek have been performing due diligence for top tier VC firms, including USVP, Mayfield, Benchmark, Morgenthaler, Panorama.  He also worked as an advisor or Board member for over 40 startups. In 1989 he was recognized as “Entrepreneur of the Year” by Arthur Young.  In 1994 he was awarded the Lifetime Achievement Award by Sensors Magazine and in 2003 by MANCEF. Bryzek has delivered over 250 presentations and papers, wrote sections of 4 books, organized and chaired many international conferences and has 23 issued US patents.  He started several sensor standardization efforts, including AAMI Disposable Blood Pressure Transducers, IEEE-1451 Smart Sensor Communication and Trillion Sensors Initiative.


EugeneDr. Eugene Chow earned his Ph.D. and M.S. in electrical engineering from Stanford University, along with an M.S. in management science and engineering. He received his B.S. in engineering physics from the University of California, Berkeley. He has over 15 issued patents and 40 journal and conference publications. Eugene’s work has covered the areas of microelectromechanical systems (MEMS), packaging and printing. Currently, he is focused on multiple application areas, including: microsprings for integrated circuit packaging and testing; novel viscous liquid printing concepts; and xerographic micro-chip assembly. Eugene has also worked on thin film transistor integration with MEMS as well as large area printed organic electronics.  Prior to coming to PARC, he developed through wafer electrical interconnects in silicon, 2D arrays of atomic force piezoresistive cantilevers, and deep plasma etching techniques.


JeremieMr. Jeremie Dalton earned his BS in Chemical Engineering from McGill University in 1997 and his MS in Chemical Engineering from Clarkson University in 1999. Mr. Dalton has over 14 years of work experience in the fields of MEMS and thin films. From 1999 to 2005, Mr. Dalton was employed as an R&D engineer for Novellus Systems, where his work focused on the development of novel barrier/seed deposition technologies for semiconductor applications. From 2005 to 2007, Mr. Dalton was employed at Genus Inc, where he developed Atomic Layer Deposition processes and equipment. From 2007 to 2013, Mr. Dalton worked as Director of Process Engineering at Formfactor, where he was responsible for the MEMS manufacturing engineering group. He has 7 issued patents in the areas of thin film deposition process and equipment design and multiple journal and conference publications. He is currently employed as a staff engineer at Enovix.


Yan DuDr. Yan Du received the B.S. degree and M.S. degree in Physics from Nanjing University, Nanjing, P.R. China, in 1999 and 2002, respectively, and Ph.D. degree in Electrical Engineering with minor in mechanical engineering from Northeastern University, Boston, MA, in 2007. In her Ph.D. study, she was focusing on interfacial force modeling and characterization in RF MEMS switches designed for harsh environment. Since 2008, she has been with Qualcomm MEMS Technologies, Inc., San Jose, CA, a MEMS company bringing a revolutionary reflective flat-panel display (Mirasol) to the consumer market, where she is a reliability and device physics engineer in the MEMS research and innovation center. Her responsibility includes fundamental understanding of electronics and optical device physics, setting reliability testing protocol for next generation devices, writing technical documents, reliability improvement and technology transfer to overseas manufacturing. Prior to joining Qualcomm, she worked as a quality assurance engineer at Coventor, Cambridge, MA, in 2007.


LeslieDr. Leslie Field is the Founder and Managing Member of SmallTech Consulting, LLC and has provided consulting services to a broad spectrum of companies for technical and strategic projects since 2002. Much of her current and recent work involves invention and development of MEMS devices and systems for medical applications. She also serves as a Consulting Professor in Electrical Engineering at Stanford University, where she teaches a graduate-level seminar course in “Engineering and Climate Change”, and she founded and runs Ice911 Research Corporation, an environmental non-profit which is a SemiFinalist in the 2013 Cleantech Open. Dr. Field worked in MEMS R&D at Hewlett-Packard Laboratories/Agilent Laboratories and during her decade there played a key role in starting HP Labs’ Micromechanics group, while also working on a variety of MEMS projects and devices. Her earlier work at Chevron Research Company resulted in improved commercial catalytic refining methods for high-octane blend-stocks and aromatics production. Leslie earned PhD and MS degrees in Electrical Engineering from UC Berkeley’s Sensor & Actuator Center, and MS and BS degrees in Chemical Engineering from MIT. She has 40 issued US patents, 17 pending patent applications and 16 technical publications to her credit. She serves on professional technical and awards committees and does volunteer work in education.


GavinDr. Gavin Ho is President of NanoFab Corporation. The company develops semiconductor technology for partners in frequency control products, MEMS sensors, 3D packaging, and More-than-Moore technology. Dr. Ho has an excellent record in technology development. All patents from his work are licensed to 4 semiconductor companies to target a $10B TAM with >10% CAGR. Sponsors and collaborators for his research also include DARPA, Analog Devices, ST Microelectronics, and National Semiconductor. From 2006 to 2008, he led a small MEMS development program at Analog Devices, Inc. From 2005 to 2006, he taught undergraduate courses at the Georgia Institute of Technology. Gavin also has a broad engineering background, including specialties in the electrical, mechanical, optical, and semiconductor domains. He received Ph.D. and M.S. degrees from the Georgia Institute of Technology in electrical and computer engineering. He was awarded the Georgia Tech Cleaver Award in 2002 as the top qualifier in the electrical engineering PhD examination. He also received M.Eng. and B.A.Sc. degrees in mechanical engineering from the University of British Columbia, Canada, and was awarded the UBC Letson Prize for top graduate in his undergraduate class.


Tai-RanDr. Tai-Ran Hsu is the Professor and Chair of the Department of Mechanical Engineering at San José State University. He teaches dynamics, engineering analysis, senior design projects, and microsystems design, manufacture and packaging. His research interest is in the application of thermomechanics in MEMS design and packaging, and nano scale engineering. He has served as a department Chair in both Canada and USA for 12 years. He was invited to deliver keynote speeches on miniaturization technologies, i.e. micro and nano technologies and micromechatronics at numerous international conferences and symposia in USA and abroad. He is a Fellow of ASME. He has published 5 books and edited 2 others in finite element methods, CAD, and MEMS as well as over 120 technical papers through peer review systems. He is the author of the following MEMS books: 1) MEMS & Microsystems: Design and Manufacture, McGraw-Hill, 2001, 2) MEMS packaging (Ed.), IET-EMIS Processing Series 3, 2004, and 3) MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering (2nd Edition), John Wiley & Sons, 2008.


AshleyDr. Unyoung (Ashley) Kim is an Assistant Professor at Santa Clara University where she serves as the Director of the Biological Microtechnology Laboratory. Professor Kim is a mechanical engineer by training with an emphasis on the integrated microfluidic systems for biotechnologies. She graduated from University of California, Santa Barbara with her Ph.D. and Certificate in College and University Teaching (CCUT) in 2009 and joined the Bioengineering faculty at Santa Clara University in 2009. Prof. Kim’s research interests involve the investigation of integrated microfluidic systems to address challenging needs in the biomedical applications.



JohnDr. John Lee is an Associate Professor of mechanical engineering at San José State University (SJSU), where his research focuses primarily on microfluidics for biomedical and electronic display applications. At SJSU he established and continues to teach hands-on laboratory courses in microfluidics and microelectromechanical systems (MEMS). Dr. Lee also teaches courses in biomechanics, manufacturing process control, and finite element analysis, as well as mechanical engineering fundamentals including mechanical design, dynamics, and fluid mechanics. His graduate studies at M.I.T. involved machine design, process development, and discrete droplet control for a 3-D Printing process using ceramic and metal powders. Prior to joining SJSU he acquired experience in the semiconductor field as a systems engineer at Applied Materials, and conducted research in micro fuel cell technology as a postdoctoral research associate at Stanford University.


RoyaDr. Roya Maboudian is Professor of chemical and biomolecular engineering and associate director of the Center of Integrated Nanomechanical Systems (COINS) at the University of California, Berkeley. She received her B.S. degree in Electrical Engineering from the Catholic University of America, Washington, D.C., and her M.S. and Ph.D. degrees in Applied Physics from the California Institute of Technology in Pasadena. Prof. Maboudian’s research interest is in the surface and materials science and engineering of micro/nanosystems. The main research activities in her group currently include investigation of the tribological issues in micro/nanoelectromechanical systems (M/NEMS) and surface interactions in microfluidic environments; silicon carbide-based sensors for harsh environment applications; nanowire- and graphene-based sensors and energy storage technologies; development of electrochemical processes for low-cost thin-film photovoltaics; and biologically inspired materials design. Prof. Maboudian has coauthored over 240 papers in peer-reviewed archival journals. She is the recipient of several awards, including the Presidential Early Career Award for Scientists and Engineers (PECASE) from the White House, NSF Young Investigator award, and the Beckman Young Investigator award. She is currently serving as editor to the IEEE Journal of Microelectromechanical Systems (JMEMS), as associate editor to IEEE/SPIE Journal on Micro/Nanolithography, MEMS and MOEMS (JM3), and as advisory board member to ACS Applied Materials and Interfaces (AMI).


MichelDr. Michel Maharbiz is an Associate Professor with the Department of Electrical Engineering and Computer Science at the University of California, Berkeley. He received his PhD from the University of California, Berkeley for his work on microbioreactor systems under Professor Roger T. Howe (EECS) and Professor Jay D. Keasling (ChemE). His work led to the foundation of Microreactor Technologies, Inc. which was acquired in 2009 by Pall Corporation. From 2003 to 2007, Michel Maharbiz was an Assistant Professor at the University of Michigan, Ann Arbor. He is the co-founder of Tweedle Technologies and served as vice-president for product development at Quswami, Inc. from July 2010 to June 2011. Prof. Maharbiz was the recipient of a 2009 NSF Career Award for research into developing microfabricated interfaces for synthetic biology. Dr. Maharbiz has been a GE Scholar and an Intel IMAP Fellow. Professor Maharbiz’s current research interests include building micro/nano interfaces to cells and organisms and exploring bio-derived fabrication methods. His group is also known for developing the world’s first remotely radio-controlled cyborg beetles. This was named one of the top ten emerging technologies of 2009 by MIT’s Technology Review (TR10) and was in Time Magazine’s Top 50 Inventions of 2009. Michel’s long term goal is understanding developmental mechanisms as a way to engineer and fabricate machines.


NadimDr. Nadim Maluf received a B.E. from the American University of Beirut, Lebanon, and M.S. from the California Institute of Technology, and a Ph.D. from Stanford University, all in electrical engineering. Dr. Maluf is a Silicon Valley business executive with 20 years of experience running NovaSensor (sold to GE), New Focus (sold to Bookham) and LumaSense Technologies (a roll-up in sensor instruments). He is currently the CEO of Qnovo Corp., a VC-backed startup developing next generation of electronic management systems for lithium-ion batteries. He managed and restructured $100M high-tech semiconductor, MEMS, electronic, and photonic/optic companies. He has taken products into medical, optical networking, test and measurement, clean tech and industrial markets. He is a consulting professor of electrical engineering at Stanford University. He is the author of the book “An Introduction to Microelectromechanical Systems, Artech House, 1st Edition (1999) & 2nd Edition (2004)”.


BabakDr. Babak Parviz is the creator of Google Glass and a director at Google X. He received his BA in Literature from University of Washington, BS in Electronics from Sharif University of Technology, MS degrees in Electrical Engineering and Physics from University of Michigan, PhD in Electrical Engineering from Univ. of Michigan; and completed his postdoctoral fellowship in Chemistry and Chemical Biology at Harvard. His research and engineering interests span novel computing and communication paradigms, bionanotechnology, MEMS, and photonics. His work has been put on display at the London Museum of Science and has received numerous recognitions and awards including NSF Career Award, MIT TR35, Time magazine’s best invention of the year(2008 and 2012), Your Health Top 10 Medical advance of the year, and top invention. In 2012 he was selected by Ad Age as one of the 50 most creative people in the United States.


KurtDr. Kurt Petersen received his BS degree cum laude in EE from UC Berkeley in 1970.  In 1975, he received a PhD in EE from the Massachusetts Institute of Technology.  Dr. Petersen established a micromachining research group at IBM from 1975 to 1982, during which he wrote the review paper “Silicon as a Mechanical Material,” published in the IEEE Proceedings (May 1982).  This paper is still the most frequently referenced work in the field of micromachining and micro-electro-mechanical systems (MEMS). Since 1982, Dr. Petersen has co-founded six successful companies in MEMS technology, Transensory Devices Inc. in 1982, NovaSensor in 1985 (now owned by GE), Cepheid in 1996 (now a public company on NASDAQ: CPHD), SiTime in 2004 (still private), Profusa in 2008 (still private), and Verreon in 2009 (acquired by Qualcomm). In 2011, Dr. Petersen joined the Band of Angels in Silicon Valley.  The Band is an angel investment group which mentors and invests in early stage, high-tech, start-up companies.  Today, he spends most of his time helping and mentoring such companies. Dr. Petersen has published over 100 papers, and has been granted over 35 patents in the field of MEMS.  In 2001 he was awarded the IEEE Simon Ramo Medal for his contributions to MEMS.  Dr. Petersen is a member of the National Academy of Engineering and is a Life Fellow of the IEEE in recognition of his contributions to “the commercialization of MEMS technology”.


BethDr. Beth Pruitt is an Associate Professor of Mechanical Engineering and Director of the Stanford Microsystems Laboratory at Stanford University. Her research projects include the development of novel processes and micromachined sensors and actuators for measuring micro-mechanical behavior, the analysis, design, and control of integrated electro-mechanical systems, and biomedical applications of nanofabricated devices with the goal of developing integrated MEMS-biological test platforms, precise measurement and analysis systems, and reliable manufacture methods. Her laboratory works on instrumentation and interfaces between the micro and macro scale, understanding the scaling properties of physical and material processes, and reproducing and propagating new technologies efficiently and robustly. She has received an NSF CAREER award, and DARPA YFA award and the Anita Borg Institute Denice Denton Emerging Leader Award. Current lab support is comprised of NSF, NIH, DARPA, CIRM and Stanford Bio-X grants. Prior to her Ph.D., she was an officer in the U.S. Navy at the engineering headquarters for the Navy nuclear program and as a Systems Engineering Instructor at the U.S. Naval Academy, where she also taught offshore sailing. Dr. Beth Pruitt did her BS at MIT and MS and PhD at Stanford. She worked on Piezoresistive Cantilevers For Characterizing Thin-Film Gold Electrical Contacts during her PhD. During her post-doc, she worked on nanostencils and polymer MEMS.


Ramesh RamadossDr. Ramesh Ramadoss received his Bachelor of Engineering degree from Thiagarajar College of Engineering, Madurai Kamaraj University, India in May 1998 and PhD degree in Electrical Engineering from the University of Colorado at Boulder in May 2003. From Jun. 2003 to Dec. 2007, he was employed as an Assistant Professor in the Department of Electrical and Computer Engineering at Auburn University, Auburn, AL. From Jan. 2008 to Mar. 2012, he was employed as a Manager at FormFactor Inc., Livermore, CA. From Apr. 2012 to May 2015, he was employed as a Senior Manager at Microprobe Inc. (Acquired by FormFactor Inc.), San Jose, CA. From Jun. 2015 to Feb. 2016, he was employed as a Technical Director at Applied Nanostructures Inc., Mountain View, CA. Currently, he is the president & CEO of IoT Technologies Inc., San Ramon, CA. He is the author or coauthor of 1 book, 4 book chapters and 55 papers. He has conducted R&D projects for DARPA, NASA, US Army, US Air Force, Sandia National Labs, and Motorola Labs. In 2013, he was elevated to the grade of IEEE Senior Member. In 2014, he founded the IEEE San Francisco Bay Area MEMS & Sensors Chapter. In 2017, he was elected as the Chair of the IEEE Santa Clara Valley Section, the world’s largest IEEE Section located in the heart of Silicon Valley. He is the Chair of the Chapters Engagement Committee in the IEEE Sensors Council. Currently, he serves as the Chair of the IEEE P2418 Blockchain Working Group.


Shuvo RoyDr. Shuvo Roy is a bioengineer whose research is dedicated to the development of biomedical devices to address unmet clinical needs through the application of microelectromechanical systems (MEMS) and related nanotechnology. He is the director of the Biodesign Laboratory and holds the Harry Wm. and Diana V. Hind Distinguished Professorship in Pharmaceutical Sciences II in the UCSF School of Pharmacy and is a faculty affiliate of the California Institute for Quantitative Biosciences (QB3). His research focuses on fabrication of silicon membranes, surface modification of MEMS substrates to enhance biocompatibility, and wireless sensors for physiological monitoring. He is the technical director of The Kidney Project, a national research project to create a small, surgically implanted, and free-standing bioartificial kidney to treat end stage renal disease (ESRD). In addition, he is a founding member of the UCSF Pediatric Device Consortium, which has a mission to accelerate the development of innovative devices for children’s health. Before joining UC San Francisco in 2008, Dr. Roy co-directed the BioMEMS Laboratory in the Department of Biomedical Engineering at Cleveland Clinic in Cleveland, Ohio. He has a PhD in electrical engineering and computer science from Case Western Reserve University in Cleveland, Ohio.


OlavDr. Olav Slogaard earned his Ph.D. degree from Stanford University in 1992. His doctoral dissertation: ‘Integrated Semiconductor Light Modulators for Fiber-optic and Display Applications’ was the basis for the establishment of a Silicon Valley firm Silicon Light Machines (SLM), co-founded by Dr. Solgaard in 1994. From 1992 to 1995 he carried out research on optical MEMS as a Postdoctoral Fellow at the University of California, Berkeley, and in 1995, he joined the Electrical Engineering faculty of the University of California, Davis. His work at UC Davis led to the invention of the multi-wavelength, fiber-optical switch, which has been developed into commercial products by several companies. In 1999 he joined Stanford University where he is now Professor of Electrical Engineering and the Director of the Edward L. Ginzton Laboratory. Professor Solgaard’s research interests include Optical MEMS, Photonic Crystals, Atomic Force Microscopy, and solar energy conversion. He has authored more than 300 technical publications and holds 50 patents. Professor Solgaard came to Stanford with the support of a Royal Norwegian Council for Scientific and Industrial Research Fellowship in 1986 and was named a Terman Fellow at Stanford for the period 1999-2002. He is a Fellow of the Optical Society of America, the Royal Norwegian Society of Sciences and Letters, and the Norwegian Academy of Technological Sciences. He is the author of the book “Photonic microsystems: Micro and nanotechnology applied to optical devices and systems, Springer, 2009.”


Paul Mr. Paul Wesling received his BS in electrical engineering and his MS in materials science from Stanford University. Following assignments at GTE/Lenkurt Electric (component engineering), ISS/Sperry Univac (bubble memory development, reliability, manufacturing engineering), Datapoint Peripheral Products (VP – Product Integrity), and Amdahl (design analysis, mainframe testing, console peripherals), he joined Tandem (now HP’s NonStop Enterprise Division) in 1985. As a member of the development team for advanced IC packaging, he designed several multi-chip module prototypes, supervised their fabrication, and tested them. In Tandem’s Education Group from 1993 to 2001, he developed courses on reliability, managed Tandem’s Distinguished Lectures series, and served on education’s Technology Initiative team. He organized a number of advanced technology and professional skills development courses for his Division and also for the IEEE. He managed a grant from the National Science Foundation for the development of multimedia educational modules in the field of IC packaging. Paul retired from HP in 2001, and now serves as the CPMT Society’s webmaster as well as Communications Director for the S.F. Bay Area’s Council. Mr. Wesling has published a number of technical and education papers and authored a book chapter. As CPMT’s vice president of publications from 1985 through January, 2008, he supervised four archival journals and a newsletter, and oversaw authors for IEEE Press books. He is a Fellow of the IEEE, and received the IEEE Centennial Medal, the CPMT Board’s Distinguished Service award, the Society Contribution Award, and the IEEE’s Third Millennium Medal. He has organized over 300 courses for the local IEEE chapter in the Santa Clara Valley (Silicon Valley), many of them held at Stanford University (and, more recently, at industrial facilities). He served as scoutmaster of his local Boy Scout Troop for 15 years, is currently Advisor of a High-Adventure Crew, and enjoys backpacking, fly fishing, and amateur radio. He was selected as a torchbearer for the Atlanta Olympics Torch Relay in 1996, based on selection by the local United Way.